MEMS Radial Thermoelectric Cooler

Overview

Hotspot management in 3D stacked ICs is one of the critical thermal challenges in modern chip design. This project designed a radial thermoelectric cooler (TEC) at MEMS scale to actively pump heat from localized hotspots on a chip surface, using the Peltier effect to move thermal energy radially outward from a central heat source to a surrounding micro-channel heat sink (MCHS).

The complete design pipeline spans analytical modelling → optimization → high-fidelity simulation → fabrication planning: a compact thermal model (CTM) reduces the device to a resistor network solved as a linear system in MATLAB, multi-objective optimization selects the Pareto-optimal geometry, and coupled multiphysics COMSOL simulations validate the design through a SolidWorks → COMSOL LiveLink → MATLAB API workflow.

View the MATLAB source code on GitHub →

Problem & Motivation

Thermal Bottleneck in 3D Stacked Chips

As transistor densities increase and chip architectures move to 3D stacking, localized thermal hotspots become the dominant failure and throttling mechanism. Conventional passive heat sinks cannot address temperature non-uniformity — the hottest region dictates the whole chip's clock speed even if the average temperature is acceptable.

Thermoelectric coolers offer active, solid-state heat pumping with no moving parts. The Peltier effect drives heat from the cold junction (chip surface) to the hot junction (heat sink), and at MEMS scale these devices can be fabricated directly on-chip. This project explores a radial TEC geometry that exploits the natural circular symmetry of a hotspot.

Conventional TEC Structure

A traditional TEC uses alternating n-type and p-type thermoelectric legs connected electrically in series and thermally in parallel between two ceramic substrates. When current flows, heat is absorbed at one junction (cold side) and released at the other (hot side) via the Peltier effect.

Chip Compartmentalization

The concept places a TEC unit directly beneath a chip's hotspot region. The chip area is compartmentalized — the central high-heat-flux zone (e.g., cache) is cooled by the TEC while the surrounding lower-flux zone (e.g., logic) is handled by the MCHS ring. This targeted cooling reduces peak temperature without over-cooling the entire die.

Proposed Design

Radial TEC Architecture

The device consists of 12 wedge-shaped TEC modules arranged radially around a central aluminum nitride (AlN) heat-spreading cylinder. Each wedge contains multiple thermoelectric stages connected in series — the final optimized design uses 7 stages per wedge with alternating n-type and p-type Bi₂Te₃ legs.

Heat flows radially outward: the inner cold junction contacts the chip's hotspot through the central cylinder, while the outer hot junction connects to a circular micro-channel heat sink that carries the rejected heat away via forced liquid cooling.

The radial geometry naturally provides increasing cross-sectional area toward the periphery, which helps accommodate the growing heat flux as Peltier effect adds Joule dissipation at each successive stage.

Single Wedge

An isometric view of one TEC wedge showing the interconnectors (copper), thermoelectric legs (Bi₂Te₃), radial insulators (AlN-loaded epoxy), and azimuthal insulators (SiO₂). The wedge angle is 30° for a 12-wedge assembly.

Layer System

Side view of the three-layer vertical stack: the chip layer (heat source) on top, an AlN insulator layer in the middle, and the TEC array layer on the bottom. Heat conducts vertically from the chip into the insulator, then spreads radially outward through the TEC stages.

TE Element

A single thermoelectric element consisting of an n-type and p-type Bi₂Te₃ leg pair connected by a copper interconnector at the hot side and an outerconnect at the cold side. The legs have a variable cross-section that increases radially.

Compact Thermal Model (CTM)

Resistor-Network Formulation

The analytical core of the project is a compact thermal model that represents the entire radial TEC as a network of thermal resistances. Each component — chip layer, insulator, TE legs, interconnectors, central cylinder — is modelled as a resistance element. Energy balance at each node yields a linear system:

AT=B\mathbf{A} \cdot \mathbf{T} = \mathbf{B}

where T\mathbf{T} is the vector of unknown node temperatures, A\mathbf{A} is a block matrix of thermal conductances, and B\mathbf{B} contains heat generation terms (chip power, split Joule heating) and boundary conditions.

The matrix A\mathbf{A} has a structured block form: Achip\mathbf{A}_\text{chip} (tridiagonal — radial conduction in the chip layer), ATEC\mathbf{A}_\text{TEC} (asymmetric tridiagonal — TEC layer with Peltier coupling), and Ave\mathbf{A}_\text{ve} (diagonal — vertical coupling between layers). This yields sub-millisecond solves in MATLAB, enabling rapid parameter sweeps that would be infeasible with full FEA.

Peltier Effect & Thermal Resistance

The cooling capacity of each TEC stage is governed by the Peltier equation:

Qc=(SpSn)ITcK(ThTc)12I2RQ_c = (S_p - S_n)\,I\,T_c - K\,(T_h - T_c) - \tfrac{1}{2}\,I^2 R

where Sp,SnS_p, S_n are the Seebeck coefficients, II is the operating current, Tc,ThT_c, T_h the cold- and hot-junction temperatures, KK the thermal conductance, and RR the electrical resistance.

Thermal resistances for wedge-shaped TE legs are computed by integration over the variable cross-section:

Rth=rinroutdrκA(r)R_\text{th} = \int_{r_\text{in}}^{r_\text{out}} \frac{dr}{\kappa \cdot A(r)}

where A(r)A(r) increases linearly with radius due to the wedge geometry, and κ\kappa is the thermal conductivity of the TE material.

Design Parameters

Parameter Space

The design involves approximately 20 parameters organized into three categories:

Boundary Conditions

  • Chip heat flux density
  • Heat sink temperature
  • Inlet water velocity
  • Convection coefficient

Geometric

  • Number of stages (NN)
  • Number of wedges (MM)
  • TEC layer thickness
  • TE leg length ratio (fLf_L)
  • Chip radius, insulator thickness

Operating

  • Operating current (II)
  • TE material properties (Bi₂Te₃)
  • Contact resistances

Sensitivity studies showed that TEC layer thickness and operating current have the most significant impact on peak chip temperature, while the number of stages and wedges are the primary discrete variables that define the device topology.

Preliminary Optimization

CTM Temperature Profile

The CTM's sub-millisecond solve time enables exhaustive parameter exploration that would be impossible with FEA. The MATLAB implementation evaluates the full thermal field across chip and TEC layers for any combination of design parameters.

Each objective function call simply assembles and solves the AT=B\mathbf{A} \cdot \mathbf{T} = \mathbf{B} system, extracts the maximum chip temperature, and returns it to the optimizer.

Grid Search on Discrete Parameters

The first optimization stage performs a brute-force grid search over the two integer parameters: NN (1–10 stages) and MM (4–36 wedges). For each (N,M)(N, M) pair, the CTM is solved and the maximum chip temperature is recorded. The matrix plot reveals the feasible design space and identifies the optimal region around N=7,M=16N = 7, M = 16.

MATLAB's parallel computing toolbox was used to distribute the grid evaluation across CPU cores, evaluating all ~200 combinations in seconds.

Multi-Objective Optimization (NSGA-II)

With discrete parameters fixed, a multi-objective optimization minimizes two conflicting objectives: maximum chip temperature and total device thickness. MATLAB's gamultiobj (NSGA-II) generates a Pareto front showing the trade-off between thermal performance and fabrication complexity.

The knee-point solution was selected: Tmax=77.8°CT_\text{max} = 77.8\,°\text{C}, thickness = 264 µm, with N=7N = 7 stages, M=16M = 16 wedges, and 112 total TE legs.

Knee-Point Solution

The selected knee-point design achieves a maximum chip temperature of 77.8 °C — well below the typical junction temperature limit of 85 °C — with a total device thickness of only 264 µm.

The complete optimal parameter set includes: 7 TEC stages, 16 radial wedges, operating current of 0.3 A, TE leg length ratio fL=0.65f_L = 0.65, insulator thickness of 15 µm, and an inner radius of 1.5 mm for the central cylinder.

COMSOL High-Fidelity Simulations

Simulation Workflow: SolidWorks → COMSOL → MATLAB

The high-fidelity validation uses a fully automated simulation pipeline driven entirely from MATLAB:

1. SolidWorks (Geometry)

Parametric CAD model of the radial TEC. Geometry dimensions are driven by the optimization variables — changing a parameter in MATLAB updates the SolidWorks model automatically.

2. COMSOL LiveLink

COMSOL imports the SolidWorks geometry via LiveLink, applies physics (thermoelectric + fluid flow + structural), meshes, and solves. The coupled multiphysics includes Peltier/Thomson effects, conjugate heat transfer, and thermal stress.

3. MATLAB API

MATLAB orchestrates the entire pipeline: sets parameters, triggers geometry rebuild, runs COMSOL solver, and extracts results. This enables parametric sweeps and automated validation against the CTM predictions.

The physics modules coupled in the simulation include: Electrical Currents, Heat Transfer in Fluids/Solids, Laminar Flow, and Solid Mechanics. Multiphysics couplings handle the thermoelectric effect, electromagnetic heating, non-isothermal flow, and thermal expansion. A segregated solver converges in 20–50 iterations.

TEC Unit: Current Sweep

A parametric sweep of operating current identifies the optimal value at 0.3 A. Below this, Peltier cooling is insufficient; above it, Joule heating dominates and the device heats the chip rather than cooling it. The outward heat flux at the optimum is 0.49 W per wedge.

Temperature Distribution

The COMSOL temperature contour at the optimum current shows the radial temperature gradient from the hot central region to the cooler outer periphery. The simulation confirms the design intent — heat is actively pumped outward through the TEC stages, creating a smooth temperature drop across the device.

Coupled TEC + MCHS

The full coupled simulation combines the TEC unit with the circular micro-channel heat sink. The MCHS features 200 µm wide channels with 50 µm walls at an inlet velocity of 0.8 m/s. Conjugate heat transfer between the solid walls and water flow provides the final heat rejection path.

Near-Channel Temperature

Temperature distribution in the region near the micro channels shows effective heat removal by the liquid coolant. The water temperature rises from 25 °C at the inlet to approximately 28 °C at the outlet, confirming adequate thermal capacity for the rejected heat load.

Structural Analysis

A thermal-structural analysis evaluates Von Mises stresses arising from thermal expansion mismatch between dissimilar materials (Bi₂Te₃, Cu, AlN, SiO₂, SU-8). The maximum stress is on the order of 10⁸ Pa, which remains within safe limits for the materials involved.

The stress concentration occurs at the interfaces between materials with significantly different coefficients of thermal expansion, particularly at the Cu–Bi₂Te₃ and AlN–SiO₂ junctions. These results inform fabrication process choices and operating temperature limits.

MEMS Fabrication

Photomask Set & Process Flow

A complete set of 10 photomasks was designed for the MEMS fabrication process. The fabrication uses standard microfabrication techniques:

  • Electroplating — copper interconnects and outerconnects
  • DRIE (Deep Reactive Ion Etching) — silicon etching for insulator and TE cavities
  • AlN-loaded epoxy paste — radial insulators (thermally conductive, electrically insulating)
  • Spin-on Glass — azimuthal insulators (SiO₂ thermal barriers)
  • SU-8 negative photoresist — micro-channel heat sink structure (1:100 aspect ratio)
  • Omnicoat — sacrificial layer for channel release

Key materials include AlN substrate (thermal spreader), Bi₂Te₃ (thermoelectric), Cu (wiring), SiO₂ (azimuthal insulation), and SU-8 (MCHS walls).

MATLAB Code Structure

Repository Organization

The MATLAB codebase is organized into focused modules:

GeometryParametric wedge, layer, and cylinder dimensions from design variables
Thermal ResistanceVariable cross-section integration for TE legs, interconnects, insulators
CTM AssemblyBlock matrix construction (A_chip, A_TEC, A_ve) and RHS vector B
OptimizationGrid search (parfor) + gamultiobj (NSGA-II) for Pareto front
VisualizationTemperature profiles, Pareto fronts, matrix plots, parametric sweeps
COMSOL InterfaceLiveLink parameter setting, solver control, result extraction via API

Documents

CTM Derivation (Appendix)

Complete mathematical derivation of the compact thermal model: geometry parametrization, thermal/electrical resistance calculation, energy balance, and block matrix formulation.

Technology Stack

MATLABCTM, optimization, orchestration
COMSOL MultiphysicsFEA simulation
SolidWorksParametric CAD geometry
LiveLink for SolidWorksCAD ↔ FEA bridge
MATLAB Parallel ComputingGrid search parallelization
gamultiobj (NSGA-II)Multi-objective optimization
Bi₂Te₃Thermoelectric material
L-Edit / KLayoutPhotomask design

Nuwantha Kumara

Mechanical Engineering student passionate about software development, simulations, and creating impactful solutions.

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